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1

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

Nicolas Ledermann, Paul Muralt, Jacek Baborowski, Sandrine Gentil, Kapil Mukati, Marco Cantoni, Andreas Seifert, Nava Setter

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 510 KB

english, 2003

2

Monitoring, assessment and modelling using water quality data in the Saale River Basin, Germany

Klaus Bongartz, Timothy D. Steele, Martina Baborowski, Karl-Erich Lindenschmidt

Journal:

Environmental Monitoring and Assessment

Year:

2007

Language:

english

File:

PDF, 415 KB

english, 2007

3

Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films

P. Muralt, J. Baborowski

Journal:

Journal of Electroceramics

Year:

2004

Language:

english

File:

PDF, 477 KB

english, 2004

4

Assessment of Water Quality in the Elbe River at Flood Water Conditions Based on Cluster Analysis, Principle Components Analysis, and Source Apportionment

Martina Baborowski, Vasil Simeonov, Jürgen W. Einax

Journal:

CLEAN – Soil, Air, Water

Year:

2012

Language:

english

File:

PDF, 1.76 MB

english, 2012

5

Spatial and temporal variability of sediment deposition on artificial-lawn traps in a floodplain of the River Elbe

M. Baborowski, O. Büttner, P. Morgenstern, F. Krüger, I. Lobe, H. Rupp, W. v. Tümpling

Journal:

Environmental Pollution

Year:

2007

Language:

english

File:

PDF, 901 KB

english, 2007

6

Size-Effect in Mesoscopic Epitaxial Ferroelectric Structures: Increase of Piezoelectric Response with Decreasing Feature-Size

Bühlmann, S., Dwir, B., Baborowski, J., Muralt, P.

Journal:

Integrated Ferroelectrics

Year:

2002

Language:

english

File:

PDF, 663 KB

english, 2002

7

Biogeochemical patterns in a river network along a land use gradient

Norbert Kamjunke, Olaf Büttner, Christoph G. Jäger, Hanna Marcus, Wolf von Tümpling, Susanne Halbedel, Helge Norf, Mario Brauns, Martina Baborowski, Romy Wild, Dietrich Borchardt, Markus Weitere…show

Journal:

Environmental Monitoring and Assessment

Year:

2013

Language:

english

File:

PDF, 1.03 MB

english, 2013

8

Processing optimization of solution derived PbZr 1−x Ti x O 3 thin films for piezoelectric applications

Seifert, Andreas, Ledermann, Nicolas, Hiboux, Stephane, Baborowski, Jacek, Muralt, Paul, Setter, Nava

Journal:

Integrated Ferroelectrics

Year:

2001

Language:

english

File:

PDF, 712 KB

english, 2001

9

Mechanisms of Pb(zr 0.53 Ti 0.47 )O 3 thin film etching with ECR/RF reactor

Baborowski, J., Muralt, P., Ledermann, N., Colla, E., Seifert, A., Gentil, S., Setter, N.

Journal:

Integrated Ferroelectrics

Year:

2000

Language:

english

File:

PDF, 761 KB

english, 2000

10

Simulation and Characterization of Piezoelectric Micromachined Ultrasonic Transducers (PMUT's) Based on PZT/SOI Membranes

Baborowski, Jacek, Ledermann, Nicolas, Muralt, Paul, Schmitt, Daniel

Journal:

Integrated Ferroelectrics

Year:

2003

Language:

english

File:

PDF, 332 KB

english, 2003

11

Local Growth of Sol-Gel Films by Means of Microhotplates

Calame, F., Baborowski, J., Ledermann, N., Muralt, P., Gentil, S., Setter, N.

Journal:

Integrated Ferroelectrics

Year:

2003

Language:

english

File:

PDF, 237 KB

english, 2003

12

Microfabrication of Piezoelectric MEMS

BABOROWSKI, JACEK

Journal:

Integrated Ferroelectrics

Year:

2004

Language:

english

File:

PDF, 1.96 MB

english, 2004

13

Etching of platinum thin films with dual frequency ECR/RF reactor

Baborowski, J., Muralt, P., Ledermann, N.

Journal:

Integrated Ferroelectrics

Year:

1999

Language:

english

File:

PDF, 993 KB

english, 1999

14

Piezoelectric cantilever microphone for photoacoustic gas detector

Ledermann, Nicolas, Baborowski, Jacek, Seifert, Andreas, Willing, Bert, Hiboux, Stephane, Muralt, Paul, Setter, Nava, Forster, Martin

Journal:

Integrated Ferroelectrics

Year:

2001

Language:

english

File:

PDF, 384 KB

english, 2001

15

Evaluation of silicon tuning fork resonators under mechanical loads and space-relevant radiation conditions

Bandi, Tobias, Baborowski, Jacek, Dommann, Alex, Shea, Herbert R., Cardot, Francis, Neels, Antonia

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Year:

2014

Language:

english

File:

PDF, 1.73 MB

english, 2014

16

SIMULATION AND CHARACTERIZATION OF PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS (pMUTs) BASED ON PZT/SOI MEMBRANES

BABOROWSKI, JACEK, LEDERMANN, NICOLAS, MURALT, PAUL, SCHMITT, DANIEL

Journal:

International Journal of Computational Engineering Science

Year:

2003

Language:

english

File:

PDF, 410 KB

english, 2003

17

Input-output Balances of Nutrients and Plankton in a Flooded Area of the Lower Odra

C. Engelhardt, A. Krüger, B. Karrasch, M. Baborowski

Journal:

CLEAN – Soil, Air, Water

Year:

1999

Language:

english

File:

PDF, 450 KB

english, 1999

18

Colloidal Particles in Sediment Pore Waters: Particle Size Distributions and Associated Element Size Distribution in Anoxic and Re-oxidized Samples, Obtained by FFF-ICP-MS Coupling

Frank v. d. Kammer, Martina Baborowski, Soheyl Tadjiki, Wolf v. Tümpling jr.

Journal:

CLEAN – Soil, Air, Water

Year:

2003

Language:

english

File:

PDF, 400 KB

english, 2003

19

Extracellular Enzyme Activity in the River Elbe during a Spring Flood Event

Bernhard Karrasch, Gerald Bormki, Peter Herzsprung, Markus Winkler, Martina Baborowski

Journal:

CLEAN – Soil, Air, Water

Year:

2003

File:

PDF, 236 KB

2003

20

The Effects of Nutrient Concentrations in the River Elbe

Helmut Guhr, Dieter Spott, Gerald Bormki, Martina Baborowski, Bernhard Karrasch

Journal:

CLEAN – Soil, Air, Water

Year:

2003

Language:

english

File:

PDF, 922 KB

english, 2003

21

Comparison of Different Monitoring Programs of the 2002 Summer Flood in the River Elbe

Martina Baborowski, Evelyn Claus, Kurt Friese, Frank von der Kammer, Petra Kasimir, Jürgen Pelzer, Peter Heininger

Journal:

CLEAN – Soil, Air, Water

Year:

2005

Language:

english

File:

PDF, 373 KB

english, 2005

22

A Dynamic Model to Simulate Arsenic, Lead, and Mercury Contamination in the Terrestrial Environment During Extreme Floods of Rivers

Marcus Schulz, Olaf Büttner, Martina Baborowski, Michael Böhme, Michael Matthies, Wolf von Tümpling

Journal:

CLEAN – Soil, Air, Water

Year:

2009

Language:

english

File:

PDF, 1.42 MB

english, 2009

23

Assessment of Water Quality in the Elbe River at Low Water Conditions Based on Factor Analysis

Martina Baborowski, Olaf Büttner, Jürgen W. Einax

Journal:

CLEAN – Soil, Air, Water

Year:

2011

Language:

english

File:

PDF, 349 KB

english, 2011

24

Effect of the nature of the working gas on the d.c. magnetron sputter deposition of chromium nitride and oxi-nitride thin films on steel substrates

J. Baborowski, M. Charbonnier, M. Romand

Journal:

Surface and Coatings Technology

Year:

1996

Language:

english

File:

PDF, 461 KB

english, 1996

25

Field-flow fractionation coupled to multi-angle laser light scattering detectors: Applicability and analytical benefits for the analysis of environmental colloids

F. v. d. Kammer, M. Baborowski, K. Friese

Journal:

Analytica Chimica Acta

Year:

2005

Language:

english

File:

PDF, 328 KB

english, 2005

26

Application of a high-performance liquid chromatography fluorescence detector as a nephelometric turbidity detector following Field-Flow Fractionation to analyse size distributions of environmental colloids

F. v.d. Kammer, M. Baborowski, K. Friese

Journal:

Journal of Chromatography A

Year:

2005

Language:

english

File:

PDF, 662 KB

english, 2005

27

Wafer level packaging technology for silicon resonators

J. Baborowski, A. Pezous, G. Spinola Durante, R. Jose James, R. Ziltener, C. Muller, M.-A. Dubois

Journal:

Procedia Chemistry

Year:

2009

Language:

english

File:

PDF, 508 KB

english, 2009

28

Element determination in natural biofilms of mine drainage water by total reflection X-ray fluorescence spectrometry

Margarete Mages, Wolf von Tümpling jun., Andrea van der Veen, Martina Baborowski

Journal:

Spectrochimica Acta Part B: Atomic Spectroscopy

Year:

2006

Language:

english

File:

PDF, 1.28 MB

english, 2006

29

Etching of RuO2 and Pt thin films with ECR/RF reactor

J Baborowski, P Muralt, N Ledermann, S Hiboux

Journal:

Year:

2000

Language:

english

File:

PDF, 458 KB

english, 2000

30

Sputtered silicon carbide thin films as protective coating for MEMS applications

N. Ledermann, J. Baborowski, P. Muralt, N. Xantopoulos, J.-M. Tellenbach

Journal:

Surface and Coatings Technology

Year:

2000

Language:

english

File:

PDF, 281 KB

english, 2000

31

Zum sterischen Verlauf asymmetrischer Induktionen. I. Beziehungen der Konstitution und Konfiguration zwischen rac. α-Alkylamino-propiophenonen und ihren Reduktionsprodukten

Prof. Dr. Karl Müller, Dr. Editha Müller, Dr. Heinz Baborowski

Journal:

Advanced Synthesis & Catalysis

Year:

1971

Language:

german

File:

PDF, 846 KB

german, 1971

32

Zum sterischen Verlauf asymmetrischer Induktionen. II. Beziehungen zwischen Substituenteneinfluß und Reaktionsbedingungen bei der Reduktion racemischer α-(Phenylalkylamino)-propiophenone mit verschiedenen Kryptobasen

Prof. Dr. Horst Karl Müller, Dr. Jürgen Schuart, Heinz Baborowski, Dr. Editha Müller

Journal:

Advanced Synthesis & Catalysis

Year:

1973

Language:

german

File:

PDF, 740 KB

german, 1973

33

Zum sterischen Verlauf asymmetrischer Induktionen. IV. Einfluß von Volumen und Induktionseffekt verschiedener Acylreste auf die Konfiguration der Reduktionsprodukte von rac. α-Acylaminopropiophenonen

Prof. Dr. Horst Karl Müller, Dr. Jürgen Schuart, Dr. Heinz Baborowski

Journal:

Advanced Synthesis & Catalysis

Year:

1973

Language:

german

File:

PDF, 745 KB

german, 1973

34

Zum sterischen Verlauf asymmetrischer Induktionen. V. Stereoselektive Synthese der threo-Epimeren von N-substituierten (±) 2-Amino-1-phenylpropanolen-(1)

Prof. Dr. Horst Karl Müller, Dr. Jürgen Schuart, Heinz Baborowski, Georg Hamm

Journal:

Advanced Synthesis & Catalysis

Year:

1975

Language:

german

File:

PDF, 453 KB

german, 1975

35

Entwicklung eines Schadstoffausbreitungsmodells zur stoffbezogenen Risikoanalyse und-bewertung extremer Hochwasserereignisse am Beispiel des Landkreises und der Stadt Bitterfeld

Wolf von Tümpling, Michael Rode, Olaf Büttner, Martina Baborowski, Michael Böhme, Cornelia Gläßer, Burkhard Sonnabend, Michael Matthies, Markus Schulz, Jochen Schanze, Ulrich Walz, Axel Sauer

Journal:

Environmental Sciences Europe

Year:

2006

Language:

german

File:

PDF, 466 KB

german, 2006

36

Auswahl der Modellkomplexität für die Beschreibung der Sauerstoffverhältnisse in Fließgewässern und Poldern während Hochwasserereignissen

I. Pech, M. Baborowski, K.-E. Lindenschmidt

Journal:

Österreichische Wasser- und Abfallwirtschaft

Year:

2008

Language:

german

File:

PDF, 3.82 MB

german, 2008

37

Microfabrication of Piezoelectric MEMS

Journal:

Journal of Electroceramics

Year:

2004

Language:

english

File:

PDF, 1.25 MB

english, 2004

38

Structural uncertainty in a river water quality modelling system

Karl-Erich Lindenschmidt, Katrin Fleischbein, Martina Baborowski

Journal:

Ecological Modelling

Year:

2007

Language:

english

File:

PDF, 1.23 MB

english, 2007

39

Spatial variability of metal pollution in groyne fields of the Middle Elbe – Implications for sediment monitoring

M. Baborowski, O. Büttner, P. Morgenstern, T. Jancke, B. Westrich

Journal:

Environmental Pollution

Year:

2012

Language:

english

File:

PDF, 1.55 MB

english, 2012

40

Consequences of delayed mixing for quality assessment of river water: Example Mulde–Saale–Elbe

Florian Weigold, Martina Baborowski

Journal:

Journal of Hydrology

Year:

2009

Language:

english

File:

PDF, 635 KB

english, 2009

41

A quasi-2D flood modeling approach to simulate substance transport in polder systems for environment flood risk assessment

Karl-Erich Lindenschmidt, Shaochun Huang, Martina Baborowski

Journal:

Science of The Total Environment

Year:

2008

Language:

english

File:

PDF, 2.66 MB

english, 2008

42

Environmental risk of dissolved oxygen depletion of diverted flood waters in river polder systems – A quasi-2D flood modelling approach

Karl-Erich Lindenschmidt, Ina Pech, Martina Baborowski

Journal:

Science of The Total Environment

Year:

2009

Language:

english

File:

PDF, 1.04 MB

english, 2009

43

Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size

Buhlmann, S., Dwir, B., Baborowski, J., Muralt, P.

Journal:

Applied Physics Letters

Year:

2002

Language:

english

File:

PDF, 418 KB

english, 2002

44

Impact of former mining activities on the uranium distribution in the River Saale (Germany)

Martina Baborowski, Elke Bozau

Journal:

Applied Geochemistry

Year:

2006

Language:

english

File:

PDF, 238 KB

english, 2006

45

Application of lake marl at Lake Arendsee, NE Germany: First results of a geochemical monitoring during the restoration experiment

D Stüben, E Walpersdorf, K Voss, H Rönicke, M Schimmele, M Baborowski, G Luther, W Elsner

Journal:

Science of The Total Environment

Year:

1998

Language:

english

File:

PDF, 364 KB

english, 1998

46

Experimental evidence of thermoelastic damping in silicon tuning fork

C. Muller, J. Baborowski, A. Pezous, M.-A. Dubois

Journal:

Procedia Chemistry

Year:

2009

Language:

english

File:

PDF, 298 KB

english, 2009

47

Imaging by time-of-flight secondary ion mass spectrometry of plasma patterned metal and oxide thin films

G. Coullerez, J. Baborowski, C. Viornery, Y. Chevolot, N. Xanthopoulos, N. Ledermann, P. Muralt, N. Setter, H.J. Mathieu

Journal:

Applied Surface Science

Year:

2003

Language:

english

File:

PDF, 646 KB

english, 2003

48

The effect of bottom electrode on the performance of thin film based capacitors in the gigahertz region

Dube, D. C., Baborowski, J., Muralt, P., Setter, N.

Journal:

Applied Physics Letters

Year:

1999

Language:

english

File:

PDF, 289 KB

english, 1999

49

Size-Based Speciation of Natural Colloidal Particles by Flow Field Flow Fractionation, Inductively Coupled Plasma-Mass Spectroscopy, and Transmission Electron Microscopy/X-ray Energy Dispersive Spectroscopy: Colloids−Trace Element Interaction

Baalousha, M., V. D. Kammer, F., Motelica-Heino, M., Baborowski, M., Hofmeister, C., Le Coustumer, P.

Journal:

Environmental Science & Technology

Year:

2006

Language:

english

File:

PDF, 294 KB

english, 2006

50

[IEEE 2007 European Conference on Circuit Theory and Design (ECCTD 2007) - Sevilla, Spain (2007.08.27-2007.08.30)] 2007 18th European Conference on Circuit Theory and Design - Ultra low-power MEMS-based radio for wireless sensor networks

Enz, Christian C., Baborowski, Jacek, Chabloz, Jeremie, Kucera, Martin, Muller, Claude, Ruffieux, David, Scolari, Nicola

Year:

2007

Language:

english

File:

PDF, 703 KB

english, 2007